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About this Engineering article
Influence of plasma exposure in the preparation of A1N films by facing-target sputtering by Kikuo Tominaga; Hiroshi Imai; Yasuhiko Sueyoshi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kikuo Tominaga; Hiroshi Imai; Yasuhiko Sueyoshi
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
- Published
- 1993
- Language
- EN
- Field
- Engineering (Physical Sciences)