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What is MEMS Course Overview and Syllabus about?

This document outlines the course details of MEMS (Micro-Electro-Mechanical Systems). The course is a 3 credit hour course introduced in 2016. The objectives are to understand MEMS devices and systems, microfabrication techniques, and MEMS applications. The syllabus covers topics such as actuation/sensing techniques, materials, microfabrication processes, packaging, and an overview of areas like bioMEMS and RF MEMS. Upon completing the course, students will be able to understand principles of microsensors/a

Author

steve johns

Language

EN