About this scholarly article

SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - Smart dielectrics of fluorinated silicon glass prepared by liquid phase deposition method by Yeh, Ching-Fa; Chen, Tien-Fu; Lee, Yueh-Chuan; Liu, Chien-Hung; Lin, Shyue-Shyh; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M. is a scholarly article available to read on EtoBox.

Author

Yeh, Ching-Fa; Chen, Tien-Fu; Lee, Yueh-Chuan; Liu, Chien-Hung; Lin, Shyue-Shyh; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M.

Publisher

SPIE

Published

2001

Language

EN