Opening book details…
About this Materials Science article
Improving Feature Size Uniformity from Interference Lithography Systems with Non-uniform Intensity Profiles by Chang, En-Chiang; Mikolas, David; Lin, Pao-Te; Schenk, Tony; Wu, Chien-Li; Sung, Cheng-Kuo; Fu, Chien-Chung is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Chang, En-Chiang; Mikolas, David; Lin, Pao-Te; Schenk, Tony; Wu, Chien-Li; Sung, Cheng-Kuo; Fu, Chien-Chung
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0957-4484)
- Published
- 2013
- Language
- EN
- Field
- Materials Science (Physical Sciences)