About this scholarly article

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Silicon grisms fabricated by anisotropic wet etching and direct silicon bonding for high-resolution IR spectroscopy by Cianci, Elena; Foglietti, Vittorio; Vitali, Fabrizio; Lorenzetti, Dario; Karam, Jean Michel; Yasaitis, John A. is a scholarly article available to read on EtoBox.

Author

Cianci, Elena; Foglietti, Vittorio; Vitali, Fabrizio; Lorenzetti, Dario; Karam, Jean Michel; Yasaitis, John A.

Publisher

SPIE

Published

2001

Language

EN