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About this Engineering article
Uncertainty Quantification of Microstructure—Governed Properties of Polysilicon MEMS by ;, is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- ;,
- Publisher
- MDPI AG; Multidisciplinary Digital Publishing Institute (MDPI); Basel: Multidisciplinary Digital Publishing Institute (MDPI), 2010- (ISSN 2072-666X)
- Published
- 2017
- Field
- Engineering (Physical Sciences)