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About this Engineering article
Ultra-small Micro Pressure Sensor Chip Design and Fabrication Featuring High-sensitivity and Good-linearity by Zheng, B. R.; Zhou, C.; Wang, Q.; Pan, X. M.; Xue, W. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Zheng, B. R.; Zhou, C.; Wang, Q.; Pan, X. M.; Xue, W.
- Publisher
- Springer-Verlag; Springer Verlag; Springer Science and Business Media LLC (ISSN 0946-7076)
- Published
- 2015
- Language
- EN
- Field
- Engineering (Physical Sciences)
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