About this scholarly article

SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - Reconfigurable lithographic applications using polymer liquid crystal composite films by Fox, Anna E.; Naber, Robert J.; Kawahira, Hiroichi; Fontecchio, Adam K. is a scholarly article available to read on EtoBox.

Author

Fox, Anna E.; Naber, Robert J.; Kawahira, Hiroichi; Fontecchio, Adam K.

Publisher

SPIE

Published

2007

Language

EN