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About this Engineering article
Spatially Resolved Measurements of Ion Density and Electron Temperature in a Dual-frequency Capacitively Coupled Plasma by Complete Floating Double Probe Technique by Jiang, Xiang-Zhan; Liu, Yong-Xin; Yang, Shuo; Lu, Wen-Qi; Bi, Zhen-Hua; Li, Xiao-Song; Wang, You-Nian is a Engineering article available to read on EtoBox.
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- Author
- Jiang, Xiang-Zhan; Liu, Yong-Xin; Yang, Shuo; Lu, Wen-Qi; Bi, Zhen-Hua; Li, Xiao-Song; Wang, You-Nian
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2011
- Language
- EN
- Field
- Engineering (Physical Sciences)