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About this Engineering article
Electron Density Oscillations in CC-RF Oxygen Plasma Investigated by Gaussian Beam Microwave Interferometry by Kullig, Christian; Dittmann, Kristian; Meichsner, Jürgen is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kullig, Christian; Dittmann, Kristian; Meichsner, Jürgen
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0093-3813)
- Published
- 2011
- Language
- EN
- Field
- Engineering (Physical Sciences)
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