About this scholarly article

SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Analytical approximations of the source intensity distributions by Granik, Yuri; Weed, J. Tracy; Martin, Patrick M.; Adam, Kostas is a scholarly article available to read on EtoBox.

Author

Granik, Yuri; Weed, J. Tracy; Martin, Patrick M.; Adam, Kostas

Publisher

SPIE

Published

2005