Opening book details…
About this Engineering article
Simulation of Limited-Area Cathode as Mask-Irradiation Source by Sohda, Yasunari; Tanimoto, Sayaka; Ohta, Hiroya is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Sohda, Yasunari; Tanimoto, Sayaka; Ohta, Hiroya
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2007
- Field
- Engineering (Physical Sciences)
More by Sohda, Yasunari; Tanimoto, Sayaka; Ohta, Hiroya
Browse all works by Sohda, Yasunari; Tanimoto, Sayaka; Ohta, Hiroya