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About this Engineering article
Study of carbon nitride films deposited using a Hall-type ion source by Bacal, M; Perrière, J; Tanguy, M; Vesselovzorov, A N; Maslakov, K I; Dementjev, A P is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Bacal, M; Perrière, J; Tanguy, M; Vesselovzorov, A N; Maslakov, K I; Dementjev, A P
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0022-3727)
- Published
- 2000
- Language
- EN
- Field
- Engineering (Physical Sciences)