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About this Engineering article
Influence of Oxygen Flow Rate on Sputter Deposition Rate and SEM Image of Copper Oxide Thin Films by Nafarizal, Nayan; Low, Jia Wei; Sahdan, Mohd Zainizan; Ahmad, Mohd Khairul; Md Shakaff, Ali Yeon; Ammar, Zakaria; Ahmad Faizal, Mohd Zain is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Nafarizal, Nayan; Low, Jia Wei; Sahdan, Mohd Zainizan; Ahmad, Mohd Khairul; Md Shakaff, Ali Yeon; Ammar, Zakaria; Ahmad Faizal, Mohd Zain
- Publisher
- Trans Tech Publications Inc.; Trans Tech Publications, Ltd.; Scitec Publications Ltd. (ISSN 1660-9336)
- Published
- 2015
- Language
- EN
- Field
- Engineering (Physical Sciences)