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Optimal design of a flexure hinge based XYφ wafer stage by Jae W. Ryu; Dae-Gab Gweon; Kee S. Moon is a Engineering article available to read on EtoBox.
What is Optimal design of a flexure hinge based XYφ wafer stage about?
Optimal design of a XY8 micromotion stage is presented. The stage consists of a monolithic flexure hinge mechanism with three piezoelectric actuators. This paper describes the procedures of selecting parameters for the optimal design. In particular, it presents a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. Experimental results indicate that the design procedure is effective, and the designed stage has the total range of 41.5 pm and 47.8 pm along the X-and Y-axes, respectively, and the maximum yaw motion range of 322.8 arcsec (1.565 mrad).
Who reads Optimal design of a flexure hinge based XYφ wafer stage?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Jae W. Ryu; Dae-Gab Gweon; Kee S. Moon
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0141-6359)
- Published
- 1997
- Language
- EN
- Field
- Engineering (Physical Sciences)