About this document
Photolithography Process Overview by B20EC016 PRATIBHA KUMARI is a document available to read on EtoBox.
Photolithography is a process used to transfer patterns onto silicon wafers. It involves coating a photoresist layer on wafers, exposing it to light through a photomask, and developing it to form the pattern. Key steps are coating, soft baking, exposure, development and hard baking. Contact, proximity and projection printing are used with different resolutions.
- Author
- B20EC016 PRATIBHA KUMARI
- Language
- EN