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About this Engineering article
Epitaxial reactor systems: characteristics, operation and epitaxy costs : G. W. Cullen, J. F. Corboy and R. Metzl. RCA Rev.44, 187 (June 1983) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 1984
- Field
- Engineering (Physical Sciences)