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About this Engineering article
Characterization of AZ-2415 as a Negative Electron Resist by Berker, T.D.; Casey, D.D. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Berker, T.D.; Casey, D.D.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0018-9200)
- Published
- 1982
- Language
- EN
- Field
- Engineering (Physical Sciences)