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About this Engineering article
Dual frequency capacitive plasmas in Fe and Ni sputter applications: correlation of discharge properties on thin film properties by Bienholz, S; Semmler, E; Awakowicz, P; Brunken, H; Ludwig, A is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Bienholz, S; Semmler, E; Awakowicz, P; Brunken, H; Ludwig, A
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0963-0252)
- Published
- 2012
- Field
- Engineering (Physical Sciences)
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