Opening book details…
About this Engineering article
WITHDRAWN: Study of plasma-nitriding process in Si with in situ spectroscopic ellipsometry by Yamada, T.; Kubo, N.; Kitahara, K.; Moritani, A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yamada, T.; Kubo, N.; Kitahara, K.; Moritani, A.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
- Published
- 2003
- Field
- Engineering (Physical Sciences)
More by Yamada, T.; Kubo, N.; Kitahara, K.; Moritani, A.
Browse all works by Yamada, T.; Kubo, N.; Kitahara, K.; Moritani, A.