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Nozzle-based Precision Patterning with Micro-/nano Fluidics Integrated Cantilevers by Juhee Ko; Nada Ben Fredj; Rafita Erli Adhawiyah; Jungchul Lee is a Engineering article available to read on EtoBox.

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As the requirements of micro-/nano printing technologies are continuously increasing, direct writing technologies on a submicron scale are drawing attention. One of the promising methods is a nozzle-based precision patterning with atomic force microscopy (AFM), which has the advantages of high position controllability including nozzle-to-substrate distance feedback under a nanometer scale. It uses a fluidic channel and a dispensing nozzle integrated with a cantilever structure for deflection monitoring. In this paper, we introduce micro/nanofluidics integrated cantilevers for nozzle-based precision patterning in several considerations: 1) numerous fabrication strategies for nozzle-integrated fluidic cantilevers; 2) methods for liquid transport; 3) methods for pattern formation; and 4) applications with various printing materials.

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Author

Juhee Ko; Nada Ben Fredj; Rafita Erli Adhawiyah; Jungchul Lee

Publisher

Springer Science and Business Media LLC

Published

2023

Language

EN

Field

Engineering (Physical Sciences)