About this scholarly article

Effect of FIB milling on MEMS SOI cantilevers by Venkatesh, C.; Singh, P. P.; Renilkumar, M.; Varma, M.; Bhat, N.; Pratap, R.; Martyniuk, M.; Keating, A.; Umama-Membreno, G.A.; Silva, K.K.M.B.D.; Dell, J.M.; Faraone, L. is a scholarly article available to read on EtoBox.

Author

Venkatesh, C.; Singh, P. P.; Renilkumar, M.; Varma, M.; Bhat, N.; Pratap, R.; Martyniuk, M.; Keating, A.; Umama-Membreno, G.A.; Silva, K.K.M.B.D.; Dell, J.M.; Faraone, L.

Publisher

IEEE

Published

2012

Language

EN