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About this Engineering article
Long-range Gettering of Microdefects in Silicon Single Crystals During the Formation of Porous Silicon Layers on Their Surface and Ion Irradiation by V. A. Perevoshchikov; V. D. Skupov is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- V. A. Perevoshchikov; V. D. Skupov
- Publisher
- SP MAIK Nauka/Interperiodica; Pleiades Publishing; Pleiades Publishing Ltd (ISSN 1063-7850)
- Published
- 1999
- Field
- Engineering (Physical Sciences)