About this scholarly article

IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) - Lifetime improvement of Si field emitter arrays by HfC coating by Nagao, M.; Sato, T.; Nicolaescu, D.; Matsukawa, T.; Kanemaru, S.; Itoh, J. is a scholarly article available to read on EtoBox.

Author

Nagao, M.; Sato, T.; Nicolaescu, D.; Matsukawa, T.; Kanemaru, S.; Itoh, J.

Publisher

Japan Soc. Promotion of Sci

Published

2003

Language

EN