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What is Lithography Final v2 about?

This review paper discusses lithography as a key fabrication method for nano-enabled sensors, detailing various techniques such as photolithography, electron beam lithography, nanoimprint lithography, soft lithography, and nanosphere lithography. Each method is evaluated for its specific applications, advantages, and limitations in sensor fabrication. The paper concludes that no single lithographic technique is suitable for all applications, highlighting the importance of combining methods for effective sen

Author

karthik8cm1b

Language

EN