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EXAFS analysis of Er sites in Er–O and Er–F co-doped crystalline Si by A Terrasi; F Priolo; G Franzò; S Coffa; F D'Acapito; S Mobilio is a Materials Science article available to read on EtoBox.
What is EXAFS analysis of Er sites in Er–O and Er–F co-doped crystalline Si about?
We present extended X-ray absorption fine structure (EXAFS) and photoluminescence (PL) analyses of Er-O and Er-F co-doped Si. Samples were prepared by multiple implants at 77 K of Er and co-dopant (O or F) ions resulting in the formation of a2 m thick amorphous layer uniformly doped with 1;10 Er/cm and 3;10 O/cm, 1;10 O/cm or 1;10 F/cm. EXAFS measurements show that the local environment of the Er sites in the amorphous layers consists of 6 Si first neighbors. After epitaxial regrowth at 620°C for 3 h, Er is fully coordinated with 8 F ions in the Er-F samples, while Si and O ions are concomitantly present in the first shell of O co-doped samples. Post regrowth thermal treatments at 900°C leave the coordination unchanged in the Er#F, while the Er#O (ratio 1 : 10) doped samples present Er sites with a fully O coordinated shell with an average of 5 O atoms and 4 O atoms after 30 s and 12 h, respectively. We have also found that the fine structure and intensity of the high-resolution PL spectra are strongly dependent on the Er-impurity ratio and on thermal process parameters in the Er-O co-doped samples, while this is not observed for the F-doped samples. The most intense PL response at
Who reads EXAFS analysis of Er sites in Er–O and Er–F co-doped crystalline Si?
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- Author
- A Terrasi; F Priolo; G Franzò; S Coffa; F D'Acapito; S Mobilio
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-2313)
- Published
- 1998
- Language
- EN
- Field
- Materials Science (Physical Sciences)
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