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Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths by L. Prager; P. Marsik; L. Wennrich; M.R. Baklanov; S. Naumov; L. Pistol; D. Schneider; J.W. Gerlach; P. Verdonck; M.R. Buchmeiser is a Engineering article available to read on EtoBox.

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Author
L. Prager; P. Marsik; L. Wennrich; M.R. Baklanov; S. Naumov; L. Pistol; D. Schneider; J.W. Gerlach; P. Verdonck; M.R. Buchmeiser
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
Published
2008
Language
EN
Field
Engineering (Physical Sciences)

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