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About this Engineering article
Silicon nitride films deposited from SiF4/NH3 gas mixtures by C. Gomez-Aleixandre; O. Sanch Ez-Garrido; J. M. Martinez-Duart; J. M. Albella is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- C. Gomez-Aleixandre; O. Sanch Ez-Garrido; J. M. Martinez-Duart; J. M. Albella
- Publisher
- Springer; Springer-Verlag; Kluwer Academic Publishers; Springer Science and Business Media LLC; Society for Mining, Metallurgy and Exploration Inc. (ISSN 0022-2461)
- Published
- 1991
- Field
- Engineering (Physical Sciences)
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