About this scholarly article

Part B: Magnetic Storage Tribology; Manufacturing/Metalworking Tribology; Nanotribology; Engineered Surfaces; Biotribology; Emerging Technologies; Special Symposia on Contact Mechanics; Special Symposium on Nanotribology - Interfacial Force Analysis and Lubrication Behavior During Post-CMP Cleaning by Ng, Dedy; Zhang, Ting-Gang; Liang, Hong is a scholarly article available to read on EtoBox.

Author

Ng, Dedy; Zhang, Ting-Gang; Liang, Hong

Publisher

ASME

Published

2006

Language

EN