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About this Engineering article
Fabrication of X-ray Zone Plates with a Minimum Zone Width Smaller Than 100Nm by Electron Beam Lithography by H. Aritome; K. Nagata; S. Namba is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- H. Aritome; K. Nagata; S. Namba
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 1985
- Field
- Engineering (Physical Sciences)