Skip to content

Opening book details…

About this Engineering article

A Power Meter for a Radio Frequency Cathode Sputtering Installation by A. G. Nagornyi; S. V. Kolinko is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
A. G. Nagornyi; S. V. Kolinko
Publisher
Springer; Pleiades Publishing; Springer Science and Business Media LLC; Pleiades Publishing Ltd (ISSN 0020-4412)
Published
2003
Field
Engineering (Physical Sciences)