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About this Engineering article
Quality Control and Electrical Properties of Thin Amorphous (SiC)1-x(AlN)x Films Produced by Radio Frequency Dual Magnetron Sputtering by Gálvez de la Puente, G.; Erlenbach, Oliver; Guerra, Jorge Andres; Hupfer, T.; Steidl, M.; De Zela, Francisco; Weingärtner, Roland; Winnacker, Albrecht is a Engineering article available to read on EtoBox.
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- Author
- Gálvez de la Puente, G.; Erlenbach, Oliver; Guerra, Jorge Andres; Hupfer, T.; Steidl, M.; De Zela, Francisco; Weingärtner, Roland; Winnacker, Albrecht
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9752)
- Published
- 2010
- Language
- EN
- Field
- Engineering (Physical Sciences)