About this scholarly article

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference - Effect of chelating agents on high resolution electron beam nanolithography of spin-coatable Al/sub 2/O/sub 3/ gel films by Saifullah, M.S.M.; Namatsu, H.; Yamaguchi, T.; Yamazaki, K.; Kurihara, K. is a scholarly article available to read on EtoBox.

Author

Saifullah, M.S.M.; Namatsu, H.; Yamaguchi, T.; Yamazaki, K.; Kurihara, K.

Publisher

Japan Society of Applied Physics

Published

1999