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About this Engineering article
Interferometric Lithography — from Periodic Arrays to Arbitrary Patterns by S.R.J. Brueck; S.H. Zaidi; X. Chen; Z. Zhang is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- S.R.J. Brueck; S.H. Zaidi; X. Chen; Z. Zhang
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 1998
- Language
- EN
- Field
- Engineering (Physical Sciences)