About this scholarly article

2013 12th International Conference on Machine Learning and Applications - Virtual Metrology in Semiconductor Manufacturing by Means of Predictive Machine Learning Models by Lenz, Benjamin; Barak, Bernd; Muhrwald, Julia; Lenz, Benjamin; Leicht, Carolin is a scholarly article available to read on EtoBox.

Author

Lenz, Benjamin; Barak, Bernd; Muhrwald, Julia; Lenz, Benjamin; Leicht, Carolin

Publisher

IEEE

Published

2013

Language

EN