About this document
SLDD Report on Substrate Polishing by Anuj Mishra is a document available to read on EtoBox.
The SLDD report by Aniket Kumar details the processes of lapping and polishing, which are essential for achieving smooth, flat, and defect-free semiconductor substrates. It outlines the methods used, including the application of abrasive slurries and the importance of substrate polishing for semiconductor device functionality. Additionally, the report covers the photolithography process, including the use of positive and negative photoresists, and describes a maskless photolithography system developed for p
- Author
- Anuj Mishra
- Language
- EN