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About this Engineering article
Relative Sputtering Rates of Oxides and Fluorides of Aluminum and Yttrium by Kim, Dae-Min; Jang, Mi-Ran; Oh, Yoon-Suk; Kim, Seongwon; Lee, Sung-Min; Lee, Sang-Ho is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kim, Dae-Min; Jang, Mi-Ran; Oh, Yoon-Suk; Kim, Seongwon; Lee, Sung-Min; Lee, Sang-Ho
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
- Published
- 2017
- Language
- EN
- Field
- Engineering (Physical Sciences)