About this scholarly article

SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Canberra, ACT, Australia (Wednesday 5 December 2007)] Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV - Design and fabrication process of a micropump using bulk Pb(Zr,Ti)O3 for microfluidic devices by Sakamoto, Ryohei; Dau, Van Thanh; Dao, Dzung Viet; Tanaka, Katsuhiko; Sugiyama, Susumu; Tan, Hark Hoe; Chiao, Jung-Chih; Faraone, Lorenzo; Jagadish, Chennupati; Williams, Jim; Wilson, Alan R. is a scholarly article available to read on EtoBox.

Author

Sakamoto, Ryohei; Dau, Van Thanh; Dao, Dzung Viet; Tanaka, Katsuhiko; Sugiyama, Susumu; Tan, Hark Hoe; Chiao, Jung-Chih; Faraone, Lorenzo; Jagadish, Chennupati; Williams, Jim; Wilson, Alan R.

Publisher

SPIE

Published

2007

Language

EN