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About this Engineering article
Three-step Decay of the Plasma Density Near the Substrate in Pulsed-dc Magnetron Sputtering Discharge by In, J H; Na, B K; Seo, S H; Chang, H Y; Han, J G is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- In, J H; Na, B K; Seo, S H; Chang, H Y; Han, J G
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0963-0252)
- Published
- 2009
- Field
- Engineering (Physical Sciences)
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