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Can I read Research activities of photolithography by synchrotron radiation from Indus-1 and Indus-2 on EtoBox?
Research activities of photolithography by synchrotron radiation from Indus-1 and Indus-2 by L.M. Rangarajan; S. Mahadevan is a Physics and Astronomy article available to read on EtoBox.
What is Research activities of photolithography by synchrotron radiation from Indus-1 and Indus-2 about?
Our electron storage ring Indus-I (450 MeV, ly mA) will soon be commissioned. The critical wavelength is 6 I A. Using the wiggler, spectral flux can be enhanced at 10 A. Hence our research work is oriented to: (i) development of master masks both for contact and proximity printing, (ii) a study of the effects of VUV and soft X-rays from synchrotron source on photoresists in SXRL. Mylar is chosen in this region as a master mask substrate for its excellent optical properties. Using the conventional photoresist system in UV lithography, pattern details of S km were printed on Mylar deposited with Au-Cr films. Later on, by depositing Ti-Pd-Au films and Waycoat resists, pattern delineation by optical lithography gave resolution features as small as 1.2 pm. Resists of both positive and negative tones were used. UV exposure (10 mW/cm\* for '7 s) was done under ambient conditions. Contrast details of pattern were estimated by measuring the optical densities. To D investigate the fundamental aspects of resist decom~sition by SR radiation, (5 to 20 A) from Indus-2, mass spectrometric analysis of residual gases is performed. It is most probable, that the PMMA and Novolac-based resists with li
Who reads Research activities of photolithography by synchrotron radiation from Indus-1 and Indus-2?
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- L.M. Rangarajan; S. Mahadevan
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV; ScienceOpen (ISSN 0168-9002)
- Published
- 1998
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)