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What is Torsional Deflection & Intrinsic Stress in MEMS about?
The document discusses torsional deflection and intrinsic stress in MEMS devices. It defines torsional deflection and derives equations for torque, shear stress, and angular displacement. It then discusses intrinsic stress in thin films used in MEMS, how intrinsic stress can induce beam bending, and strategies to minimize unintended bending.
- Author
- amitava2010
- Language
- EN