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Limits of a single active transistor-based amplifier designed for co-integrated M-NEMS/CMOS oscillator purposes by G. Arndt; E. Colinet; J. Arcamone; J. Juillard is a Engineering article available to read on EtoBox.

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This work proposes a generic methodology to evaluate the feasibility of designing a MEMS resonator-based Pierce oscillator according to any given CMOS technology with the constraint of using only one single active transistor. This approach, applied to the case of a capacitive doubly-clamped beam resonator used in its in-plane fundamental vibration mode, is validated by simulations using a 0.13μm CMOS technology.

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Author

G. Arndt; E. Colinet; J. Arcamone; J. Juillard

Publisher

Elsevier ; [Oxford]: Elsevier Ltd.; Elsevier BV (ISSN 1877-7058)

Published

2010

Language

EN

Field

Engineering (Physical Sciences)