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About this Engineering article
Ion beam milling of InP with an Ar/O2-gas mixture by Katzschner, W.; Steckenborn, A.; Löffler, R.; Grote, N. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Katzschner, W.; Steckenborn, A.; Löffler, R.; Grote, N.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1984
- Field
- Engineering (Physical Sciences)
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