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About this Materials Science article
Ultrathin Mo/MoN bilayer nanostructure for diffusion barrier application of advanced Cu metallization by Bin Zhao; Kefei Sun; Zhenlun Song; Junhe Yang is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Bin Zhao; Kefei Sun; Zhenlun Song; Junhe Yang
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
- Published
- 2010
- Language
- EN
- Field
- Materials Science (Physical Sciences)
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