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About this Engineering article
Impacts of Temperature and Reactant Flow Rate Transients on LPCVD Tungsten Silicide Film Properties by Cale, T. S; Park, J.-H.; Raupp, G. B.; Jain, M. K. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Cale, T. S; Park, J.-H.; Raupp, G. B.; Jain, M. K.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1991
- Language
- EN
- Field
- Engineering (Physical Sciences)
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