About this scholarly article

2011 IEEE International Conference of Electron Devices and Solid-State Circuits - MEMS thermal mass flow meter with double-heater structure by Wu, Yuan-Qing; Yao, Su-Ying is a scholarly article available to read on EtoBox.

Author

Wu, Yuan-Qing; Yao, Su-Ying

Publisher

IEEE

Published

2011

Language

EN