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This document presents a high-sensitivity digital flow meter designed for respiratory monitoring and neonatal ventilation, utilizing a low-power Thermo-resistive Micro Calorimetric Flow (TMCF) sensor fabricated with CMOS-MEMS technology. The flow meter achieves a sensitivity of 76.5 mV/SLM, a response time of less than 11.5 ms, and can accurately detect various respiratory patterns, including apnea and hypopnea. Its optimized packaging and digital output enhance its performance and integration into respirat
- Author
- chiranjit sarkar
- Language
- EN