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About this Engineering article
Effect of Hydrogen on Secondary Grain Growth of Polycrystalline Silicon Films by Excimer Laser Annealing in Low-Temperature Process by Heya, Akira; Matsuo, Naoto; Matsumura, Hideki; Kawamoto, Naoya is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Heya, Akira; Matsuo, Naoto; Matsumura, Hideki; Kawamoto, Naoya
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)