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Morphological and compositional study of CBD-ZnSe thin films by microscopy techniques and angle resolved XPS by A.M. Chaparro; C. Maffiotte; M.T. Gutiérrez; J. Herrero is a Engineering article available to read on EtoBox.

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A morphological and compositional study is carried out on ZnSe thin ®lms obtained by the chemical bath deposition (CBD) method. SEM, TEM and AFM images are shown for the morphological characterisation. Angle-resolved XPS (ARXPS) measurements are used for the study of surface and subsurface composition of the ®lms. The composition underneath is studied with XPS analysis of ®lms eroded by sputtering. It is found that ®lms have a mixed ZnSe-ZnO (or Zn(OH) 2 ) composition. The Zn/Se ratio in the ®lm increases with depth, indicating that Zn is preferentially as ZnO-Zn(OH) 2 close to the ®lm-substrate interface, and that the ZnSe proportion increases above. Such composition inhomogeneity is attributed to a change in the deposition mechanism during ®lm growth. At ®rst, it proceeds via reaction of adsorbed Zn and Se precursors, and then by deposition of ZnSe clusters formed in the bulk of the solution. Apparently the ®rst mechanism is less ef®cient for the formation of a pure ZnSe ®lm, at least under the experimental conditions used here, hence gives rise to higher concentration of Zn oxides close to the ®lm-substrate interface. At longer times during the deposition process, the cluster pr

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Author

A.M. Chaparro; C. Maffiotte; M.T. Gutiérrez; J. Herrero

Publisher

Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)

Published

2000

Language

EN

Field

Engineering (Physical Sciences)