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About this Engineering article
Surface Evaluation of Fluorinated Diamond-Like Carbon Thin Film as an Antisticking Layer of Nanoimprint Mold by Yamada, Noriko; Nakamatsu, Ken-ichiro; Kanda, Kazuhiro; Haruyama, Yuichi; Matsui, Shinji is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yamada, Noriko; Nakamatsu, Ken-ichiro; Kanda, Kazuhiro; Haruyama, Yuichi; Matsui, Shinji
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2007
- Field
- Engineering (Physical Sciences)